Excimer Laser Lithography (SPIE Press Monograph Vol. PM03) Dr. Kanti Jain 1990 Contents – Sources for Deep Ultraviolet Lithography – Lithography with Conventional Lasers – Lithography with Excimer Lasers – Excimer Laser Sources – Resists for Excimer Laser Lithography – Excimer Laser Etching and Deposition Author: Dr. Kanti JainBiography Dr. Kanti Jain is Professor of Electrical & Computer Engineering at the University of Illinois, Urbana-Champaign. He is also President and Founder of Anvik Corporation. A scientist and technologist by profession, he is a graduate of the University of Illinois and IIT-Kharagpur. He has been active in the microelectronics industry for over 30 years and is a member of the US National Academy of Engineering. His technological contributions include the inventions of fundamental manufacturing processes used worldwide in the production of computer chips and flat-screen televisions. Paperback: 214 pages Publisher: SPIE Publications (February 1, 1990) We always combine shipments and refund the excess shipping by PayPal. Powered by SixBit’s eCommerce Solution