“The Physics of Submicron Lithography” by Kamil A. Valiev is a comprehensive textbook focusing on the technology and science behind submicron lithography. Published by Springer in 1992 as part of the Microdevices Series, this hardcover book covers topics in physics, chemistry, and industrial technology. With 493 pages, this book delves into the physics of condensed matter, spectroscopy, and general physics, making it a valuable resource for students and professionals in the field. Written in English, this textbook offers a deep exploration of submicron lithography, making it an essential addition to any library focused on technology and engineering.